JPH0448261U - - Google Patents
Info
- Publication number
- JPH0448261U JPH0448261U JP9065590U JP9065590U JPH0448261U JP H0448261 U JPH0448261 U JP H0448261U JP 9065590 U JP9065590 U JP 9065590U JP 9065590 U JP9065590 U JP 9065590U JP H0448261 U JPH0448261 U JP H0448261U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- manipulator
- vacuum
- holder
- stepping motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9065590U JPH08362Y2 (ja) | 1990-08-31 | 1990-08-31 | 真空蒸着用マニピュレータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9065590U JPH08362Y2 (ja) | 1990-08-31 | 1990-08-31 | 真空蒸着用マニピュレータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0448261U true JPH0448261U (en]) | 1992-04-23 |
| JPH08362Y2 JPH08362Y2 (ja) | 1996-01-10 |
Family
ID=31825591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9065590U Expired - Lifetime JPH08362Y2 (ja) | 1990-08-31 | 1990-08-31 | 真空蒸着用マニピュレータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08362Y2 (en]) |
-
1990
- 1990-08-31 JP JP9065590U patent/JPH08362Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08362Y2 (ja) | 1996-01-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |